System Capabilities and Specifications:

  • 2D and 3D optical stitching images using Keyence VHX5000
  • Keyence VKX250 Laser confocal microscope to measure warpage, curvature, and step profile
  • Nomarski microscope
  • Front and Backside Laser Imaging
  • Front and Backside CCD Imaging
  • Thermal IR Imaging