Sonix ECHO  VS Scanning Acoustic Microscope

Chip Targets Incorporated has the latest Scanning Acoustic Microscope from Sonix, the Sonix ECHO VS machine.  This machine is mainly used to determine delaminations and voids at the die surface (C-Mode SAM and TAMI) as well as the die and thermal pad interfaces (Thru-SAM). For further information, please click the following Sonix training document.

System Capabilities and Specifications

  • C-Mode SAM, TAMI, and Through SAM analysis capabilities.
  • 15MHz, 75MHz, 110MHz, and 150MHz Transducers
  • 5 um resolution in horizontal directions.
  • Stack Die imaging