JEOL JSM6600F Field Emission Scanning Electron Microscope (FE SEM)
Scanning Electron Microscopy (SEM) has two main advantages over the optical microscope: SEM can provide higher magnification and it has a better depth of field than the optical microscope. It is therefore a very common tool for physical analysis.
With shrinking feature and defect sizes, it has become more difficult for filament-based (Tungsten or LaB6) SEMs to use very high magnification without charging or damaging the device with their high beam currents. Field Emission SEMs, such as the JEOL JSM6600F, are a standard inspection tool.
System Capabilities and Specifications:
- Sample Size (Stage): 160mm x 160 mm (fit 6 inch wafer)
- Resolution: 2.5 nm
- Operating Voltage: 0.5 to 30 KV
- Magnification: 10X to 500,000X
