SEM EDX
At Chip Targets Incorporated, we use the following field emission SEMs for inspections and EDX analysis:
- JEOL JSM6600F,
- FEI Strata 400S
System Capabilities and Specifications:
- Sample Size (Stage): 160mm x 160 mm (fit 6 inch wafer)
- Resolution: 1 nm
- Operating Voltage: 0.5 to 30 KV
- Magnification: 10X to 500,000X
- Secondary Emission and Backscattering Electron
