SEM EDX

SEM EDX

At Chip Targets Incorporated, we use the following field emission SEMs for inspections and EDX analysis:

  •  JEOL JSM6600F,
  • FEI Strata 400S

System Capabilities and Specifications:

  • Sample Size (Stage): 160mm x 160 mm (fit 6 inch wafer)
  • Resolution: 1 nm
  • Operating Voltage: 0.5 to 30 KV
  • Magnification: 10X to 500,000X
  • Secondary Emission and Backscattering Electron